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发明名称
WAVEGUIDE TYPE OPTICAL UNIT AND METHOD FOR DETECTING POSITION
摘要
申请公布号
AU2003220915(A1)
申请公布日期
2003.10.13
申请号
AU20030220915
申请日期
2003.03.28
申请人
NTT ELECTRONICS CORPORATION;NIKON CORPORATION
发明人
KEIICHI AKAGAWA;KATSUHIKO KURUMADA;TOSHIAKI TAMAMURA;MASATOSHI KANAYA;SHIGENDO NISHI
分类号
G01D5/353;(IPC1-7):G02B26/08;G02B26/02
主分类号
G01D5/353
代理机构
代理人
主权项
地址
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