MANUFACTURING METHOD FOR HIGHLY ORIENTED MAGNETIC THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacture comprising simple and easy manufacturing processes suitable for the mass production of a highly oriented magnetic thin film having a coercivity of 20 kOe or higher. SOLUTION: The highly oriented magnetic thin film oriented in a single direction comprises a magnetically isolated fine-grained structure. In a manufacturing method therefor, an alloy thin film of at least one kind of metal out of Fe and Co, and at least one kind of metal out of Pt and Pd is formed on a substrate whose surface temperature is 650°C or more, by sputtering. COPYRIGHT: (C)2004,JPO