METHOD AND EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR DEVICE,申请号KR20030020012-传众专利搜索

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发明名称	METHOD AND EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号	KR20030079720(A)	申请公布日期	2003.10.10
申请号	KR20030020012	申请日期	2003.03.31
申请人		发明人
分类号	C23C16/455;H01L21/205;C23C16/44;C23C16/452;C23C16/458;C30B25/14;H01L21/00;H01L21/304;H01L21/306;H01L21/3065	主分类号	C23C16/455
代理机构		代理人
主权项
地址

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