发明名称 CAPACITANCE TYPE SENSOR
摘要 <p><P>PROBLEM TO BE SOLVED: To prevent output from being affected by components in other axial directions. <P>SOLUTION: A diaphragm 40 is arranged at a location opposite to electrodes E1-E5 for capacitative elements formed on a substrate 20. The diaphragm 40 is displaced in the direction of a Z axis as a stick 30 is operated from the outside and moved in the direction of the Z axis and constitutes the capacitative elements C0-C5 in-between the electrodes E1-E5 for the capacitative elements. Recessed parts 41-45 are formed and arranged in the upper surface of the diaphragm 40 in the same circumference containing a region inside and corresponding to the stick 30. In the case that a force in the direction of a Y axis is exerted on the stick 30 from the outside, an output component in the direction of an X axis and an output component in the direction of the Z axis change approximately linearly to the magnitude of the force in the direction of the Y axis. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2003287468(A) 申请公布日期 2003.10.10
申请号 JP20020091917 申请日期 2002.03.28
申请人 NITTA IND CORP 发明人 MORIMOTO HIDEO
分类号 G01L5/16;G06F3/033;G06F3/038;H01L29/84;(IPC1-7):G01L5/16 主分类号 G01L5/16
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