| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical magnetic recording medium that has noise characteristics lower, than when using a Permalloy (R) series or sendust group crystalline materials and a very flat soft magnetic lining layer, and is capable of high-density recording, and provide a magnetic recording device using it, and to provide a manufacturing method and machine for the vertical magnetic recording medium. SOLUTION: This vertical magnetic recording medium 1 has a soft magnetic lining layer 3, a vertical recording layer 4 consisting of a ferromagnetic material, and a protective layer 5, all being laminated on a base 2. The soft magnetic lining layer 3 is composed of a soft magnetic material of FeSiAlN film, and the FeSiAlN film can change the atom% of Fe, Si, Al, and N, by changing the amount of N<SB>2</SB>gas in the mixture gas containing N<SB>2</SB>and Ar gas supplied into the chamber. COPYRIGHT: (C)2004,JPO |
