| 摘要 |
PURPOSE:To realize the integration of compact mechanism parts capable of fine adjustment of submicron order by providing a phased array laser with a notch spring means. CONSTITUTION:A lens 2 and a phase correction plate 3 are arranged in a cylinder 1; a phased array laser 4 is fixed on a transfer stand 12, which can be moved in the arrow 8 direction by a fine adjustment mechanism 14 having a notch spring 15. The transfer stand 12 has a structure which is driven by a screw 9. The notch spring 15 arranged in two stages guides the parallel travelling of the transfer stand 12 in the arrow 8 direction. The notch spring 15 is deformed by a notch part 13. Thereby, the relative position between the phased array laser and the phase correction plate can be adjusted with accuracy of submicron order, and a compact structure is realized. |
