| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a novel pass box wherein magnetic matters containing iron stuck on the surface of a wafer cassette box transferred into a clean room can be removed to prevent the matters from being dispersed in the clean room. <P>SOLUTION: The pass box 10a is used to clean the wafer cassette box B transferred into a clean room for manufacturing a semiconductor device. The box is provided with at least two opening/closing doors 14 and 16, a housing container 34 to house the wafer cassette box B therein, an air shower mechanism 20 that sprays clean air over the wafer cassette box B housed in a housing container 12 and removes foreign matters stuck thereon, and a magnet separator mechanism that allows a magnet member 40 to be close or to be in contact with the wafer cassette box B housed in the container 12 and removes the magnetic matters stuck thereon. <P>COPYRIGHT: (C)2004,JPO |
