MINUTE METALLIC FOREIGN SUBSTANCE DETECTOR AND MINUTE METALLIC FOREIGN SUBSTANCE MEASURING METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a minute metallic foreign substance detector for detecting a very small metallic foreign substance and to provide a measuring method for the very small metallic foreign substance by using the detector. SOLUTION: In the minute metallic foreign substance detector, a very small change in a magnetic field due to the very small metal foreign substance (2) inside a specimen placed between a magnetic pole (1) and a Hall element (3) is measured by the Hall element mounted on a surface at right angles to a magnetic flux. COPYRIGHT: (C)2004,JPO