| 摘要 |
PROBLEM TO BE SOLVED: To automatically correct the movement of the visual field of a transmission electron microscope that occurs when the magnifying power of the microscope is changed. SOLUTION: The visual field of the transmission electron microscope is searched at a first magnifying power and sample stage coordinates to be recorded, designated on the transmitted electron beam image of a sample displayed in an image display section are calculated and stored (S13 and S14). An image to be recorded is segmented from the transmitted electron beam image of the sample at the first magnifying power and stored as a first image. Then the magnifying power of the microscope is set to a second magnifying power of a recording mode and a sample stage is moved to the stored sample stage coordinates to be recorded (S22). In addition, the transmitted electron beam image at the second magnifying power is fetched with the same number of pixels as that of pixels of the first image (S25) and the moving amount between the first and second images is calculated from the relative intensity between the images (S26). Thereafter, the position of the transmitted electron beam image at the second magnifying power with respect to an image picking-up means is corrected so that the moving amount may become zero (S28) and an obtained transmitted electron beam image is recorded (S29). COPYRIGHT: (C)2004,JPO
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