HIGH SELECTIVITY SILVER ETCHANT

摘要

PURPOSE: A high selectivity silver(Ag) etchant is provided, which is environmentally friendly, has proper etching ratio and side etching amount and particularly has not any IZO attack by containing a large amount of water and 0.5 to 10 wt.% of Fe¬3+ salt compound as oxidizer. CONSTITUTION: The silver(Ag) etchant comprises 0.5 to 10 wt.% of Fe¬3+ salt compound; 0.1 to 12 wt.% of HNO3; 3 to 15 wt.% of CH3CO2H; 0.01 to 3.0 wt.% of corrosion inhibitor; and a balance of water, wherein the Fe¬3+ salt compound is selected from the group consisting of FeCl3, Fe(NO3)3, NH4Fe(SO4)2 and Fe2(SO4)3, and wherein the corrosion inhibitor is a compound selected from the group consisting of m-toluylenediamine, ethylenediaminetetraacetate(EDTA), hexamethylenetetraamine(HMTA), triethylenetetraamine(TETA), octylamine, tetra methylene tetramine(TMTA), benzotriazole(BTA), 5-aminotetrazole(5-ATZ) and triazole.