| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and an inspection device in which occurrence of the Moire phenomenon due to the effect of the non-light-emitting part of the fluorescent substance coated in stripe shape is reduced and inspection of the coating unevenness of the fluorescent substance coated in stripe shape is carried out in high precision. SOLUTION: This is an inspection method of a fluorescent substance in which ultraviolet rays are irradiated on a plurality of fluorescent substance of stripe shape formed on the substrate and the light emitted from the fluorescent substance of stripe shape is photographed, and the signal level of the image photographed as above is detected, and the average value of the part of the signal levels corresponding to the signal level that is the prescribed value or more is calculated, and the coating unevenness of the fluorescent substance of stripe shape is detected based on the average value obtained as above. COPYRIGHT: (C)2004,JPO
|
