| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate treatment device capable of early detecting a coating failure to a substrate. <P>SOLUTION: A coating unit 14 of a substrate treatment device is provided with a stage 3 having a holding face 30 on which a rectangular substrate 90 is almost horizontally mounted, a crosslinked structure 4 almost horizontally crosslinked above the holding face 30, and an image pickup part 23 for imaging the surface of the substrate 90. The crosslinked structure 4 is provided with a nozzle supporting part 40 on which a slit nozzle for discharging a resist is mounted. The surface of the substrate 90 is scanned by the slit nozzle while the resist is applied. When the application of resist is finished, the surface of the substrate 90 is imaged by the image pickup part 23, and image data are transferred to a deciding part 24. Image recognition is performed to the image data by the deciding part 24, and the coating condition of the substrate 90, that is, whether or not a coating failure such as fading is generated on the substrate 90 is decided. <P>COPYRIGHT: (C)2004,JPO |
