METHOD AND APPARATUS FOR MANUFACTURING PROBE FOR SCANNING PROBE MICROSCOPE, AND PROBE MANUFACTURED BY THE SAME METHOD

摘要

PROBLEM TO BE SOLVED: To obtain a probe with carbon nanotubes for a scanning probe microscope which can manufacture in an atmosphere in a short manufacturing time in a mass production and which does not exert an adverse influence on mechanical and electrical characteristics of the nanotubes. SOLUTION: A method for manufacturing the probe for the scanning probe microscope comprises the steps of: opposing the probe 5 of a metal or a semiconductor sharpened at a tip end to an electrode 4 at a small interval in a container 3 for filling a solution 2 for dispersing the carbon nanotubes 7 in an organic solvent; and applying a voltage to the probe 5 and the electrode 4 to adhere the nanotubes 7 to the tip end of the probe 5. COPYRIGHT: (C)2004,JPO