发明名称 |
DEVICE FOR HANDLING FLAT PANELS IN A VACUUM |
摘要 |
A linear motion assembly is provided as part of a robot for processing substrates in a vacuum. An effector assembly is mounted for linear movement on linear bearings. The end effectors are driven by cables which in turn are driven by a drive which is positioned in an adjacent pressure vessel maintained at atmospheric pressure. |
申请公布号 |
WO03084043(A2) |
申请公布日期 |
2003.10.09 |
申请号 |
WO2003US05191 |
申请日期 |
2003.02.21 |
申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
POOLE, DENNIS, P. |
分类号 |
B25J19/00;B25J9/04;B25J18/04;B65G49/06;B65G49/07;H01L21/677 |
主分类号 |
B25J19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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