| 摘要 |
The present invention has a configuration in which a line confocal optical system is formed and plural times of illumination by lines of lights are carried out. Particularly, in the present invention, the diffraction grating 32 produces the mxn number of sub beams. Further, the mxn number of sub beams are deflected by the acoustic optical element 33 so that their irradiation areas are to be continuous. Therefore, since the beam carries out scanning using the mxn number of sub beams, scanning can be completed in a short time.
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