VERTICAL MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDER HAVING SAME, VERTICAL MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD, AND VERTICAL MAGNETIC RECORDING MEDIUM MANUFACTURING APPARATUS

摘要

A vertical magnetic recording medium having a low-noise characteristic compared to media of a permalloy or sendust crystalline material, comprising a high-flatness soft magnetic backing layer, and enabling recording/reproduction of information at high recording density, a magnetic recorder provided with the vertical magnetic recording medium, a vertical magnetic recording medium manufacturing method, and a vertical magnetic recording medium manufacturing apparatus are disclosed. The vertical magnetic recording medium (1) has a multilayer structure on a substrate (2), in which a soft magnetic backing layer (3), a vertical recording layer (4) of a ferromagnetic body, and a protective layer (5) are formed. The soft magnetic backing layer (3) is formed of an FeSiAlN film of a soft magnetic material. The atom% of each element of Fe, Si, Al, and N of the FeSiAlN film can be changed by changing the flow rate of N2 gas in a mixture gas of N2 gas and Ar gas introduced into the chamber.