Electrostatic actuator and camera module using the same

摘要

An electrostatic actuator comprises first and second stator sections having a first electrode array arranged in a first direction, and a second electrode array of electrodes extending in the first direction, respectively. A movable section having fifth and sixth electrodes arranged to face the first and second electrode arrays, respectively, is arranged between the first and second stator sections. A driving circuit alternately performs a first driving operation in which a DC voltage is applied between the adjacent electrodes of the first electrode array and a second driving operation in which a DC voltage is applied between the electrodes of the second electrode array. The voltage application is successively performed by deviating the positions of the electrodes to which the voltage is applied so as to move the movable section in the first direction while vibrating the movable section between the first and second stator sections.