发明名称 Apparatus for transporting substrates in an oven
摘要 The invention concerns a transport apparatus for transporting substrates in an oven. The oven has a channel formed from a floor and two side walls in which the substrates are transported in a transport direction. The floor of the channel has a recess running along one of the side walls for accepting and guiding a rail in transport direction. The rail is set up for accepting at least one substrate. A drive mechanism moves the rail in transport direction.
申请公布号 US2003190574(A1) 申请公布日期 2003.10.09
申请号 US20030390203 申请日期 2003.03.14
申请人 SCHMID RETO;SUTER GUIDO 发明人 SCHMID RETO;SUTER GUIDO
分类号 H01L21/677;(IPC1-7):F27D3/04 主分类号 H01L21/677
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