摘要 |
<p>A solar cell has a monocrystalline or polycrystalline silicon layer (11) and a silicon layer (12) containing carbon. The silicon layer (12) containing carbon is formed on the monocrystalline or polycrystalline silicon layer (11) by hot-wire CVD. The silicon layer (12) containing carbon has a fine crystalline silicon column (12b) therein. The silicon layer (12) containing carbon has a high conductivity. The silicon layer (12) containing carbon has a high hydrogen concentration layer (12a) at an interface with the monocrystalline or polycrystalline silicon layer (11).</p> |