MICROMECHANICAL SENSOR HAVING A SELF-TEST FUNCTION AND OPTIMIZATION METHOD

摘要

The invention relates to a micromechanical sensor comprising: a substrate (1) with a structured layer (3) located thereon; a seismic mass (5) that can be displaced in relation to the structured layer (3) by a spring force; at least one measuring capacitor electrode arrangement (15, 16, 17) for detecting a displacement of the seismic mass (5) in a measuring direction, and; at least one drive capacitor electrode arrangement (18, 19) for diverting the seismic mass (5) in a self-test direction, whereby the measuring direction is perpendicular to the self-test direction. The invention also relates to a corresponding optimization method.