| 摘要 |
PURPOSE:To enable the number of lots to be reduced by providing a means for registering an item value group which is extracted by a classification table record extraction means according to conditions using a classification process flow registration means according to conditions into a basic process flow file. CONSTITUTION:One record is extracted from a classification table file according to conditions 100 by a classification table record extraction means according to conditions 4, records including a process name item value which matches according to a master name record retrieving means 7 are retrieved from a basic process flow file 300, and the process name item value of the file 300 is compared. Records including the process name item value which matches are retrieved by a basic process flow record retrieving means 8, an item value group which is extracted by the extraction means 4 using a classification process flow registration means according to conditions 9 is registered into the file 300, and a semiconductor process flow file including a record where different conditions are specified for each wafer is created. Thus, semiconductor process treatment conditions can be set for each wafer and the number of lots can be reduced by setting a plurality of process treatment conditions as one lot. |
