Method of manufacturing organic electroluminescent panel, organic electroluminescene device, and mask

摘要

A method of manufacturing an organic EL panel is provided, which is capable of forming an organic luminescent layer without scratching an organic layer formed beneath. An organic luminescent layer is formed by evaporating an organic luminescent material over a hole injecting electrode by placing a mask used to evaporate a luminescent layer to be kept spaced apart from a substrate. By placing the mask while a bottom surface thereof is brought into contact with top surfaces of spacers, it is possible to space apart the mask from a hole transporting layer formed over the substrate. Although it is necessary to fine-tune the position of the mask during the color-layer successive deposition step of the organic luminescent layers, by performing the positioning while the mask is kept spaced apart from the substrate, it is possible to reduce a possibility that the mask scratches the hole transporting layer.