APPARATUS AND METHOD FOR DEPOSITING ORGANIC MATTER OF VAPOR PHASE

摘要

The present invention relates to a vapor organic material deposition method and a vapor organic material deposition apparatus using the same which are capable of fast growing a thin film uniformly on a wider substrate by spraying a vapor organic material in a gravity direction using a spraying unit installed in an upper side of the same and accurately and stably adjusting a thickness of a wider substrate of an organic thin film by using a diluting gas as a deposition material and continuously carrying a small size heat source to a scan head.