摘要 |
<p>A method of electrochemically processing an article having a semi-insulating element (32) and a conducting element (31) comprises forming a conductive layer (33) on the article, the conductive layer (33) comprising at least a first region covering at least a portion of the semi-insulating element (32) and a second region covering at least a portion of the conducting element (31); gripping with at least one conductive gripper a portion of the first region; submerging at least a portion of the second region in an electrolyte while keeping the conductive gripper out of said electrolyte (35); and conducting current through a circuit comprising the conducting element, the conductive layer (33), the conductive gripper, and an electrode submerged in the electrolyte (35). The conductive layer (33) is preferably formed by diffusing a dopant from a vapor phase.</p> |