摘要 |
PURPOSE:To improve a heat resisting property, an anti-dry-etching property and an adhesive property against a substrate of the titled composition by incor porating a novolak resin having >=80 deg.C glass transition temp. Tg and a novolak resin having the Tg lower than said Tg of the novolak resin by >=30 deg.C. CONSTITUTION:In the titled composition comprising the novolak resin and 1,2-quinone diazide compd., and novolak resin (A) has >=80 deg.C Tg, preferably 80-250 deg.C Tg, more preferably 100-250 deg.C, while the novolak resin (B) has the Tg lower than that of the resin (A) by >=30 deg.C, preferably 30-180 deg.C, more preferably 50-180 deg.C. The compounding amount of the resin (A) is preferably 50-98wt%, the compounding amount of the resin (B) is preferaby 2-50wt% on the basis of total weight of the novolak resin contg. in the titled composition. |