发明名称
摘要 PURPOSE:To improve a heat resisting property, an anti-dry-etching property and an adhesive property against a substrate of the titled composition by incor porating a novolak resin having >=80 deg.C glass transition temp. Tg and a novolak resin having the Tg lower than said Tg of the novolak resin by >=30 deg.C. CONSTITUTION:In the titled composition comprising the novolak resin and 1,2-quinone diazide compd., and novolak resin (A) has >=80 deg.C Tg, preferably 80-250 deg.C Tg, more preferably 100-250 deg.C, while the novolak resin (B) has the Tg lower than that of the resin (A) by >=30 deg.C, preferably 30-180 deg.C, more preferably 50-180 deg.C. The compounding amount of the resin (A) is preferably 50-98wt%, the compounding amount of the resin (B) is preferaby 2-50wt% on the basis of total weight of the novolak resin contg. in the titled composition.
申请公布号 JPH042180(B2) 申请公布日期 1992.01.16
申请号 JP19840266378 申请日期 1984.12.19
申请人 发明人
分类号 G03C1/72;G03F7/023;H01L21/027 主分类号 G03C1/72
代理机构 代理人
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