| 摘要 |
<p>It is possible to easily produce a thin-film magnetic head having a high write-in accuracy by suppressing a magnetic field leak between an upper magnetic pole and a lower magnetic pole. On a thin-film magnetic head substrate, a magnetoresistive element (14), a lower magnetic pole (20), a write gap layer (24), and an upper magnetic pole (26) are formed in this order, thereby fabricating the thin film magnetic head. After the lower magnetic pole is formed, the lower magnetic pole (20) is so patterned as to have a larger width than the width of the upper magnetic pole (26) in the write magnetic pole. Subsequently, an insulation layer (30) composed of a non-magnetic body is formed in the same layer as the lower magnetic pole (20) in such a manner that the insulation layer (30) is flattened together with the lower magnetic pole (20). On the surface of the lower magnetic pole (20) and the insulation layer (30), the write gap layer (24) is formed and then the upper magnetic pole (24) is formed on the surface of the write gap layer (24). Lastly, FIB trimming is performed to remove a protrusion of the lower magnetic pole from the side surface.</p> |
