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发明名称
Vorrichtung zur großflächigen Plasmaerzeugung
摘要
申请公布号
DE19548657(C2)
申请公布日期
2003.10.09
申请号
DE19951048657
申请日期
1995.12.17
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
HEINRICH, FRIEDHELM;BAENZIGER, ULRICH
分类号
H01J37/32;H01Q1/36;(IPC1-7):H05H1/46;H01L21/306;H01Q9/00
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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