| 摘要 |
PURPOSE:To confirm the pattern of a reticle without opening a reticle case on the outside of a clean room by attaching a magnifying lens, which magnifies the image of the pattern of the reticle in the reticle case, to the reticle case. CONSTITUTION:A reticle case 10 is approximately square and consists of upper and lower case members 12 and 14 made of transparent resin materials. A semicylindrical lens 22 made of resin materials is attached to the outside face of a surface wall part 12c in the center of the upper case member 12. This lens 22 is a kind of convex lens, and a pattern P of a reticle 16 and an auxiliary pattern Q are so magnified that they can be confirmed on the outside of the reticle case 10. |
