ZOOM IN PIN NEST STRUCTURE, TEST VEHICULE HAVING THE STRUCTURE, AND METHOD OF FABRICATING THE STRUCTURE
摘要
A test vehicle (100) comprises a substrate (99), a plurality of nested serpentine lines (202) on the substrate, and a plurality of test pads (204) on the substrate. Each serpentine line has a plurality of turn sections that comprise two parallel line segments connected by a perpendicular line segment. Each of the plurality of test pads is connected to a respective turn section of a respective one of the nested serpentine lines. Each pair of test pads connected to one of the subset of the nested serpentine lines has at least a respectively different turn section portion connected therebetween.
申请公布号
WO03083497(A1)
申请公布日期
2003.10.09
申请号
WO2003US09193
申请日期
2003.03.26
申请人
PDF SOLUTIONS, INC.;CIPLICKAS, DENNIS, J.;HESS, CHRISTOPHER;STINE, BRIAN, E.;WEILAND, LARG
发明人
CIPLICKAS, DENNIS, J.;HESS, CHRISTOPHER;STINE, BRIAN, E.;WEILAND, LARG