| 摘要 |
PURPOSE:To detect defects with simple processing at a high speed by positioning a filter and the diffracted light at the time of an inspection via the control of the reflected light direction only, controlling the incident light direction to control the reflection direction, and setting the inspection region to the portion with many repetitions only. CONSTITUTION:Inspection regions for individual visual fields are calculated in advance based on the design data of the pattern generated by a computer 15, and the inspection region corresponding to each visual field is set at the time of an inspection. An XY table 13 is provided on the mount bed of a tested sample, the partial visual field of the tested pattern is inspected in sequence, the correction in the rotation angle direction is performed in package at the time of the positioning of a filter 8 and the diffracted light, and only the reflected light direction is corrected during the inspection for each visual field. For the correction of the reflected light direction, a control device 14 adjusts the angle of the folded mirror 5 of a projecting system to correct the incident light direction, only the pattern section with many repetitions is inspected to remove the remaining pattern, and the portion with few repetition is removed by masking. |
