发明名称 METHOD FOR FABRICATING MAGNETIC RAM
摘要 PURPOSE: A method for fabricating a magnetic RAM(MRAM) is provided to improve characteristics and reliability of the device by improving electrical characteristics of the device by patterning a MTJ(Magnetic Tunneling Junction) cell using two masks. CONSTITUTION: The magnetic RAM comprises a transistor comprised in an active region of a semiconductor device and a MTJ(Magnetic Tunneling Junction) cell(49) connected to a drain of the above transistor. The MTJ cell comprises a magnetic pinned layer(39) formed on its bottom and a tunneling barrier layer(45) and a magnetic free layer(47) patterned more larger than the magnetic pinned layer on the top of the magnetic pinned layer.
申请公布号 KR20030078136(A) 申请公布日期 2003.10.08
申请号 KR20020016978 申请日期 2002.03.28
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, SEUNG SEOK
分类号 G11C11/15;(IPC1-7):G11C11/15 主分类号 G11C11/15
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