发明名称 EVAPORATION METHOD AND METHOD FOR MANUFACTURING DISPLAY DEVICE
摘要 The evaporation method of this invention comprises a process for tightly placing an evaporation mask on a substrate, and a process for disposing an evaporation material on the surface of the substrate through a plurality of openings formed in the evaporation mask by moving a plurality evaporation sources along the entire length of the substrate for forming a pattern. The evaporation sources are loaded with different evaporation materials. A plurality of evaporation layers can be continuously disposed on the substrate by sequentially or simultaneously moving the evaporation source.
申请公布号 KR20030078749(A) 申请公布日期 2003.10.08
申请号 KR20030019461 申请日期 2003.03.28
申请人 发明人
分类号 H05B33/10;C23C14/04;C23C14/12;C23C14/24;H01L27/32;H01L51/00;H01L51/40;H01L51/56 主分类号 H05B33/10
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