| 发明名称 |
COIL ON A SEMICONDUCTOR SUBSTRATE AND METHOD FOR PRODUCTION THEREOF |
| 摘要 |
A coil device comprises a coil conductor track (10), a semiconductor substrate (50) and a dielectric layer (60) arranged on the semiconductor substrate (50), whereby at least a part of the coil conductor track (10) is arranged over a recess (80) in the dielectric layer (60). |
| 申请公布号 |
AU2003218795(A1) |
申请公布日期 |
2003.10.08 |
| 申请号 |
AU20030218795 |
申请日期 |
2003.03.19 |
| 申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
KARLHEINZ MUELLER;KEVNI BUEYUEKTAS;KLAUS KOLLER |
| 分类号 |
H01F17/00;H01F41/04;H01L21/02;H01L23/522;H01L27/08;(IPC1-7):H01F41/04 |
主分类号 |
H01F17/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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