METHOD AND APPARATUS FOR MEASURING SUBSTRATE TEMPERATURE,申请号EP19990906951-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR MEASURING SUBSTRATE TEMPERATURE
摘要
申请公布号	EP1060370(B1)	申请公布日期	2003.10.08
申请号	EP19990906951	申请日期	1999.02.11
申请人	APPLIED MATERIALS, INC.	发明人	YAM, MARK;HUNTER, AARON, M.
分类号	G01J5/00;G01J5/04;(IPC1-7):G01J5/04	主分类号	G01J5/00
代理机构		代理人
主权项
地址

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