发明名称 |
SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER |
摘要 |
<p>The mass flow controller of the present invention includes a sensor. This sensor is used to detect a mass flow within a gas line. Additionally, this sensor provides an output to an electronic control system coupled to the sensor. The electronic control system will determine an expected mass flow based on the output of the sensor. The electronic control system will adjust a control valve with a control signal to regulate a first gas flow through the control valve. <IMAGE></p> |
申请公布号 |
EP1212665(B1) |
申请公布日期 |
2003.10.08 |
申请号 |
EP20000939986 |
申请日期 |
2000.06.21 |
申请人 |
MYKROLIS CORPORATION |
发明人 |
TINSLEY, KENNETH, E.;TARIQ, FAISAL |
分类号 |
G01F1/696;G05B23/02;G05D7/06;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):G05D7/06 |
主分类号 |
G01F1/696 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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