摘要 |
A method of manufacturing a semiconductor device according to a first aspect of the present invention includes: forming a first photosensitive resin cured layer including a first opening above a semiconductor substrate, on which a underlying wiring layer is formed, the first opening being made above the underlying wiring layer; forming a second photosensitive resin cured layer including a second opening on the first photosensitive resin cured layer, a bottom of the second opening including an opening top of the first opening; and forming a wiring layer so as to fill in the first and second openings. |