| 发明名称 |
Level control systems for high purity chemical delivery systems |
| 摘要 |
A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
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| 申请公布号 |
US6629627(B1) |
申请公布日期 |
2003.10.07 |
| 申请号 |
US19980013327 |
申请日期 |
1998.01.26 |
| 申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
SIEGELE STEPHEN H.;NOAH CRAIG M.;GREGG JOHN N. |
| 分类号 |
G01F23/60;B01J4/00;B01L3/08;B67D7/02;B67D7/84;C23C16/44;C23C16/448;C23C16/52;F17C1/00;F17C5/00;F17C5/02;F17C5/06;F17C6/00;F17C7/00;F17C9/00;F17C13/02;F17C13/04;G01F23/24;G01F23/26;G01F23/292;G01F23/70;G01F23/72;G01F23/74;G05D9/12;H01L21/205;H01L21/31;(IPC1-7):B67D5/00 |
主分类号 |
G01F23/60 |
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