发明名称 Rotational mask scanning exposure method and apparatus
摘要 A method and rotational mask scanning apparatus for exposing a plurality of images on a workpiece, include a rotatable mask having a pattern of image segments thereon, an optical system for projecting the image segments onto the workpiece, and a device for at least one of rotating the mask and for moving the workpiece so as to continuously expose a plurality of regions on the workpiece with the pattern of image segments.
申请公布号 US6630987(B2) 申请公布日期 2003.10.07
申请号 US20010825880 申请日期 2001.04.05
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ANDERSON BRENT ALAN;COFFEY MICHAEL
分类号 G03F1/14;G03F7/20;(IPC1-7):G03B27/42;G03B27/50;G03B27/48;G03B27/32 主分类号 G03F1/14
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