Semiconductor auto leak rate tester

摘要

A method for automatically conducting a leak test for a vacuum system includes receiving a process status input representing the completion of a manufacturing cycle. On determining that the process status is in a complete state, the vacuum system isolation valve is closed. In one embodiment, the first pressure input is measured at the beginning of the leak test and compared to a second pressure input measured at the expiration of timer. If the difference between the first and second pressure measurements are greater than the configurable threshold pressure, then the vacuum system is determined to be leaky. In another embodiment, the vacuum system is determined to be leaky if at least one of a series of pressure measurements exceeds the threshold pressure value. In response to the determination of the leak, an interlock signal to disable the operation of the vacuum system is activated.