X-Y stage apparatus capable of reducing the number of drive sources

摘要

A first slider moves along a guide rail extending in a Y-axis direction and includes a beam extending in an X-axis direction, a T-shaped section, and an arm member. The T-shaped section moves along the guide rail at an end of the beam. The arm member extends in the Y-axis direction at the other end of the beam. A second slider moves in the X-axis direction along the beam. The first slider is supported on the base by static pressure air bearing pads disposed at two positions on the lower surface of the T-shaped section, at at least one position on the lower surface of the beam at the central portion thereof and at the two positions on the lower surface of the arm member. The second slider is supported on the base by static pressure air bearing pads disposed at three positions on the lower surface thereof.