| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method in which the irregularity in the diameters of holes can be reduced. <P>SOLUTION: The laser beam is made incident on the surface of a work object 25 while a gas is being flowed along the surface of the work object and a plurality of holes 31 are formed by moving an incident position. At this time, the incident position of the laser beam is moved in a direction that an angle between a vector 2 in which the center H<SB>0</SB>of the hole which is already formed is made to be a starting point and the center H<SB>1</SB>of the hole to be formed next is made to be an end point and the vector V<SB>1</SB>to show the flow of the gas with a visual line parallel with the normal line on the surface of the work object is made to be 45°or more, and is not moved in a direction to be less than 45°. <P>COPYRIGHT: (C)2004,JPO</p> |
