摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser machine in which laser output can be executed in response to the moving distance despite the speed change when the speed is changed while a workpiece is being moved and a free straight line with a voluntary angle can be machined on an object to be machined at a voluntary equal pitch beam interval even in a machining shape, a controller thereof, and a control method of the laser machine. <P>SOLUTION: The laser machine is provided with a laser beam guide tube, a mirror, and a lens or the like which are irradiating means to irradiate the laser beam in a pulse manner with the object to be machined, a control means to control the irradiating time and the timing, a moving means to move at least either of the irradiating means and the object to be machined, and a detecting means to detect a deviation amount from a reference position of the object to be machined as for corresponding to correction of misalignment in setting (parallel dislocation and angular dislocation) of the object to be machined. Scribe machining at an equal pitch can be executed by controlling the output of the laser beam at the time when a set moving amount is moved. <P>COPYRIGHT: (C)2004,JPO</p> |