发明名称 Ionizer for gas cluster ion beam formation
摘要 A neutral beam ionizing apparatus for electron impact ionization of a substantially cylindrical neutral beam. The apparatus includes an electron source, and a circularly cylindrical ionizing region that is substantially free of magnetic fields. In one embodiment of the invention, the beam is a gas cluster beam, and the electron source includes a heated filament for emitting thermions, the filament including one or more direction reversals shaped to produce self-nulling magnetic fields so as to minimize the magnetic field due to filament heating current. In another embodiment of the invention, a neutral beam ionizing apparatus for electron impact ionization of a substantially cylindrical neutral beam includes at least one electron source, and an elliptically cylindrical ionizing region. In one embodiment, the elliptically cylindrical ionizing region includes a pair of co-focal elliptically cylindrical electrodes biased so as to cause electrons emitted from the at least one electron source to orbit repeatedly through the axis of the beam to be ionized.
申请公布号 US6629508(B2) 申请公布日期 2003.10.07
申请号 US20000733211 申请日期 2000.12.08
申请人 EPION CORPORATION 发明人 DYKSTRA JERALD P.
分类号 H01J27/20;H01J37/08;H01J49/04;(IPC1-7):C23C16/00;H05B31/26 主分类号 H01J27/20
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