| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet recording head having an integrated circuit useful for miniaturizing an inkjet printer, and an inkjet printer which is made more compact while a high printing quality is maintained. SOLUTION: An essential part of the inkjet recording head H shown in Fig. 5 has a nozzle plate 100 joined to the lower side of an ink chamber substrate 200 for forming a plurality of ink chambers 210, and a diaphragm 300 set in contact with the upper side. A piezoelectric element 400 is set via a base layer 700 at a position corresponding to each ink chamber 210 at the opposite side to the ink chamber substrate 210 of the diaphragm 300. The head H is manufactured with the use of a substrate having a stopper layer held between an Si single crystal substrate and an Si single crystal layer. The Si single crystal substrate is made the ink chamber substrate 200, and the Si single crystal layer and the stopper layer are made the diaphragm 300. The integrated circuit 9 is formed integrally with the diaphragm 300 at the same side as the side of the piezoelectric elements 400 of the diaphragm 300. COPYRIGHT: (C)2004,JPO
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