| 摘要 |
PROBLEM TO BE SOLVED: To produce a compact silicon sintered body. SOLUTION: Silicon powder of an average grain size≤15μm is held in the temperature region≥1,100°C for the required time in non-oxidative atmosphere and, thereafter, is sintered while being subjected to a pressure≥50 kgf/cm<SP>2</SP>. Thereby, the silicon sintered body of a relative density≥90% can be obtained. COPYRIGHT: (C)2004,JPO
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