WAFER PROBE STATION PROVIDED WITH AUXILIARY CHUCK

摘要

PURPOSE: To achieve a continuous test by using an auxiliary chuck that can be interconnected to a wafer chuck removably. CONSTITUTION: A system 120 of auxiliary chucks 92 and 94 is inserted between a stage 83 and the auxiliary chucks 92 and 94, thus performing level adjustment between the upper smoothing surface of the auxiliary chucks 92 and 94 and that of a wafer chuck 80 or the other auxiliary chucks 92 and 94 and hence compensating for the difference in thickness among a wafer, a contact substrate, and a calibration substrate that are placed on a chuck member 20 simultaneously and moving a wafer probe 30 from one to the other easily without any difference in a contact pressure or without any risk of the preceding stage of a probe chip 32 from being damaged owing to a level difference. As a result, a continuous test can be performed.