METHOD AND DEVICE FOR FORMING PATTERN,申请号JP19910219072-传众专利搜索

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发明名称	METHOD AND DEVICE FOR FORMING PATTERN
摘要
申请公布号	JPH0661132(A)	申请公布日期	1994.03.04
申请号	JP19910219072	申请日期	1991.08.30
申请人	OKI ELECTRIC IND CO LTD	发明人	ENDO AKIHIRO
分类号	G03F7/20;G03F7/38;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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