GAS DISTRIBUTING APPARATUS USED FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PURPOSE: A gas distributing apparatus used for a semiconductor manufacturing equipment is provided to be capable of considerably reducing the number of screw connections between an upper and lower plate and the number of O-rings used for sealing between the upper and lower plate. CONSTITUTION: A gas distributing apparatus used for a semiconductor manufacturing equipment is provided with an upper plate(20) having at least one port, connected with a gas pipe and a lower plate(10) including a plurality of jetting holes(16) and an outer lateral portion(12) connected with the upper plate. Preferably, the lower plate further includes at least one block(14) for homogeneously distributing the gas, which is supplied from the port and flowed into the space formed by the upper and lower plate, to the jetting holes.