发明名称 SPOT EXPOSURE APPARATUS
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a spot exposure apparatus, with which accurate spot exposing work is easily performed and high workability is always kept. <P>SOLUTION: A camera image display area and a recorded image display area are displayed on a screen of a monitor M for spot exposure work. Further, vertical and horizontal cursor lines that move in conjunction in both the areas are displayed, and by aligning the cursor line with a pattern P in the recorded image display area, the cursor line of in the camera image display area also corresponds with a pattern in the area. Alignment of the lighting range of exposure aperture for a defective part F in the camera image display area is performed easily and accurately, with the cursor line as a target. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2003282399(A) 申请公布日期 2003.10.03
申请号 JP20020079095 申请日期 2002.03.20
申请人 HITACHI KOKUSAI ELECTRIC INC 发明人 SHIMIZU TAKAHIRO;KOSUGE SHOGO
分类号 G03F1/72;G03F1/74;H01L21/027;(IPC1-7):H01L21/027;G03F1/08 主分类号 G03F1/72
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