摘要 |
PROBLEM TO BE SOLVED: To provide a part mounting method and unit thereof which accurately perform ultrasonic junction with high reliability even when a junction area between a part and a mounting subject is wide. SOLUTION: The unit comprises a parts supply means, a mounting head that holds a supplied part to mount it one the mounting subject, a support stage that fixes/supports the mounting subject, and a means that relatively moves the mounting heat and the support stage to align the part and the mounting subject. The mounting head 5 includes an ultrasonic vibration generating means 16; a resonant body 27 where one end face is connected to the ultrasonic vibration generating means 26, the other end face is an operating surface 30, vibration input to the one end face becomes vibration approximately parallel with the surface at the operating surface 30, and a node 31 of resonant mode is formed on an axis core perpendicular to the operating surface 30; and a loading means that applies pressing load to the node of resonant body 27. COPYRIGHT: (C)2004,JPO |