发明名称 PARTS MOUNTING METHOD AND UNIT THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a part mounting method and unit thereof which accurately perform ultrasonic junction with high reliability even when a junction area between a part and a mounting subject is wide. SOLUTION: The unit comprises a parts supply means, a mounting head that holds a supplied part to mount it one the mounting subject, a support stage that fixes/supports the mounting subject, and a means that relatively moves the mounting heat and the support stage to align the part and the mounting subject. The mounting head 5 includes an ultrasonic vibration generating means 16; a resonant body 27 where one end face is connected to the ultrasonic vibration generating means 26, the other end face is an operating surface 30, vibration input to the one end face becomes vibration approximately parallel with the surface at the operating surface 30, and a node 31 of resonant mode is formed on an axis core perpendicular to the operating surface 30; and a loading means that applies pressing load to the node of resonant body 27. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003282645(A) 申请公布日期 2003.10.03
申请号 JP20020087596 申请日期 2002.03.27
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MINAMITANI SHOZO;MAE TAKAHARU;UENO YASUHARU;YAMADA AKIRA;KANAYAMA SHINJI
分类号 B23K20/10;B23K101/36;H01L21/60;H01L21/607;(IPC1-7):H01L21/60 主分类号 B23K20/10
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